Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472443 | Selectively groundable cover ring for substrate process chambers | Muhammad M. Rasheed, William Johanson, Zhenbin Ge, Goichi Yoshidome | 2016-10-18 |
| 9464349 | Adjustable process spacing, centering, and improved gas conductance | Lara Hawrylchak | 2016-10-11 |
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Donny Young, Wei Wang, Ananthkrishna Jupudi, Thanh X. Nguyen | 2016-05-17 |
| 9343274 | Process kit shield for plasma enhanced processing chamber | Muhammad M. Rasheed, Donny Young, Uday Pai | 2016-05-17 |