Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9404174 | Pinned target design for RF capacitive coupled plasma | Alan A. Ritchie | 2016-08-02 |
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Wei Wang, Ananthkrishna Jupudi, Thanh X. Nguyen, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9343274 | Process kit shield for plasma enhanced processing chamber | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Uday Pai | 2016-05-17 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Alan A. Ritchie, Uday Pai, Muhammad M. Rasheed, Keith A. Miller | 2016-04-05 |
| 9255322 | Substrate processing system having symmetric RF distribution and return paths | Alan A. Ritchie, Muhammad M. Rasheed, Keith A. Miller | 2016-02-09 |