Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476122 | Wafer processing deposition shielding components | Martin Lee Riker, Anantha K. Subramani | 2016-10-25 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | Joung Joo Lee, William Johanson, Alan A. Ritchie | 2016-04-19 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Donny Young, Alan A. Ritchie, Uday Pai, Muhammad M. Rasheed | 2016-04-05 |
| 9255322 | Substrate processing system having symmetric RF distribution and return paths | Donny Young, Alan A. Ritchie, Muhammad M. Rasheed | 2016-02-09 |
| 9249500 | PVD RF DC open/closed loop selectable magnetron | — | 2016-02-02 |