Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472443 | Selectively groundable cover ring for substrate process chambers | Kirankumar Neelasandra SAVANDAIAH, William Johanson, Zhenbin Ge, Goichi Yoshidome | 2016-10-18 |
| 9396933 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandia, Xianmin Tang, Vivek Agrawal +5 more | 2016-07-19 |
| 9343274 | Process kit shield for plasma enhanced processing chamber | Donny Young, Kirankumar Neelasandra SAVANDAIAH, Uday Pai | 2016-05-17 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Donny Young, Alan A. Ritchie, Uday Pai, Keith A. Miller | 2016-04-05 |
| 9281167 | Variable radius dual magnetron | Thanh X. Nguyen, Rongjun Wang, Xianmin Tang | 2016-03-08 |
| 9255322 | Substrate processing system having symmetric RF distribution and return paths | Donny Young, Alan A. Ritchie, Keith A. Miller | 2016-02-09 |