| 9472443 |
Selectively groundable cover ring for substrate process chambers |
Kirankumar Neelasandra SAVANDAIAH, William Johanson, Zhenbin Ge, Goichi Yoshidome |
2016-10-18 |
| 9396933 |
PVD buffer layers for LED fabrication |
Mingwei Zhu, Rongjun Wang, Nag B. Patibandia, Xianmin Tang, Vivek Agrawal +5 more |
2016-07-19 |
| 9343274 |
Process kit shield for plasma enhanced processing chamber |
Donny Young, Kirankumar Neelasandra SAVANDAIAH, Uday Pai |
2016-05-17 |
| 9303311 |
Substrate processing system with mechanically floating target assembly |
Donny Young, Alan A. Ritchie, Uday Pai, Keith A. Miller |
2016-04-05 |
| 9281167 |
Variable radius dual magnetron |
Thanh X. Nguyen, Rongjun Wang, Xianmin Tang |
2016-03-08 |
| 9255322 |
Substrate processing system having symmetric RF distribution and return paths |
Donny Young, Alan A. Ritchie, Keith A. Miller |
2016-02-09 |
