Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9472443 | Selectively groundable cover ring for substrate process chambers | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, Zhenbin Ge, Goichi Yoshidome | 2016-10-18 | $11,711,000 |
| 9315891 | Methods for processing a substrate using multiple substrate support positions | Joung Joo Lee, Keith A. Miller, Alan A. Ritchie | 2016-04-19 | $19,369,000 |