Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343274 | Process kit shield for plasma enhanced processing chamber | Muhammad M. Rasheed, Donny Young, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Donny Young, Alan A. Ritchie, Muhammad M. Rasheed, Keith A. Miller | 2016-04-05 |