Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Donny Young, Wei Wang, Thanh X. Nguyen, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9252002 | Two piece shutter disk assembly for a substrate process chamber | Cheng-Hsiung Tsai, Robert Dinsmore, Song-Moon Suh | 2016-02-02 |