Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269562 | In situ chamber clean with inert hydrogen helium mixture during wafer process | John C. Forster, Song-Moon Suh, Cheng-Hsiung Tsai, Glen T. Mori | 2016-02-23 |
| 9252002 | Two piece shutter disk assembly for a substrate process chamber | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Song-Moon Suh | 2016-02-02 |