Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Todd Egan, Kalyanjit Ghosh, Leon Volfovski, Michael R. Rice +1 more | 2016-09-13 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Jeffrey A. Brodine, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |
| 9269562 | In situ chamber clean with inert hydrogen helium mixture during wafer process | Robert Dinsmore, John C. Forster, Cheng-Hsiung Tsai, Glen T. Mori | 2016-02-23 |
| 9252002 | Two piece shutter disk assembly for a substrate process chamber | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Robert Dinsmore | 2016-02-02 |