Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446522 | Presence sensing and position correction for wafer on a carrier ring | John Mazzocco | 2016-09-20 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |