Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425076 | Substrate transfer robot end effector | Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425076 | Substrate transfer robot end effector | Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni, Glen T. Mori | 2016-08-23 |