Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508584 | In-situ removable electrostatic chuck | Michael S. Cox, Lara Hawrylchak | 2016-11-29 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Glen T. Mori | 2016-08-23 |