Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9508584 | In-situ removable electrostatic chuck | Lara Hawrylchak, Steven V. Sansoni | 2016-11-29 | $13,456,000 |
| 9472434 | Locally heated multi-zone substrate support | — | 2016-10-18 | $11,711,000 |
| 9460950 | Wafer carrier for smaller wafers and wafer pieces | Cheryl Knepfler | 2016-10-04 | $14,162,000 |
| 9240308 | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2016-01-19 | $15,148,000 |
| 9230780 | Hall effect enhanced capacitively coupled plasma source | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2016-01-05 | $12,358,000 |