Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508584 | In-situ removable electrostatic chuck | Lara Hawrylchak, Steven V. Sansoni | 2016-11-29 |
| 9472434 | Locally heated multi-zone substrate support | — | 2016-10-18 |
| 9460950 | Wafer carrier for smaller wafers and wafer pieces | Cheryl Knepfler | 2016-10-04 |
| 9240308 | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2016-01-19 |
| 9230780 | Hall effect enhanced capacitively coupled plasma source | Rongping Wang, Brian T. West, Roger M. Johnson, Colin John Dickinson | 2016-01-05 |