Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9240308 | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2016-01-19 |
| 9230780 | Hall effect enhanced capacitively coupled plasma source | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2016-01-05 |