Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514968 | Methods and apparatus for selective oxidation of a substrate | Agus Sofian Tjandra, Christopher S. Olsen, Johanes S. Swenberg | 2016-12-06 |
| 9508584 | In-situ removable electrostatic chuck | Michael S. Cox, Steven V. Sansoni | 2016-11-29 |
| 9464349 | Adjustable process spacing, centering, and improved gas conductance | Kirankumar Neelasandra SAVANDAIAH | 2016-10-11 |