Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni | 2016-08-23 |
| 9269562 | In situ chamber clean with inert hydrogen helium mixture during wafer process | Robert Dinsmore, John C. Forster, Song-Moon Suh, Cheng-Hsiung Tsai | 2016-02-23 |