Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502294 | Method and system for wafer level singulation | Klaus Schuegraf, Seshadri Ramaswami, Mohsen Salek, Claes Bjorkman | 2016-11-22 |
| 9443714 | Methods and apparatus for substrate edge cleaning | James M. Holden, Song-Moon Suh, Todd Egan, Kalyanjit Ghosh, Leon Volfovski +1 more | 2016-09-13 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Abraham Ravid, Todd Egan, Eran Weiss, Izya Kremerman | 2016-08-02 |