Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490154 | Method of aligning substrate-scale mask with substrate | Todd Egan, Paul Connors, Sergey Starik, Ganesh Balasubramanian | 2016-11-08 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Todd Egan, Eran Weiss, Michael R. Rice, Izya Kremerman | 2016-08-02 |