Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Nir Merry, Chandrakant M. Sapkale, Jeffrey C. Hudgens | 2016-12-27 |
| 9457464 | Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens | 2016-10-04 |
| 9405287 | Apparatus and method for optical calibration of wafer placement by a robot | Abraham Ravid, Todd Egan, Eran Weiss, Michael R. Rice | 2016-08-02 |
| 9334127 | Systems, apparatus and methods for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens | 2016-05-10 |
| 9325228 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing | Jeffrey C. Hudgens, Jeffrey A. Brodine, Damon K. Cox | 2016-04-26 |