Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530623 | Process chamber apparatus, systems, and methods for controlling a gas flow pattern | Chandrakant M. Sapkale, Izya Kremerman, Jeffrey C. Hudgens | 2016-12-27 |
| 9508375 | Modification of magnetic properties of films using ion and neutral beam implantation | Majeed A. Foad | 2016-11-29 |
| 9508576 | Process equipment architecture | Jacob Newman, Dinesh Kanawade, Miriam Schwartz, Michael Thomas Haag | 2016-11-29 |
| 9429248 | Process chamber gas flow apparatus, systems, and methods | Chandrakant M. Sapkale, Karuppasamy Muthukamtchi, Jeffrey C. Hudgens, Penchala N. Kankanala | 2016-08-30 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2016-07-12 |
| 9296105 | Vibration-controlled substrate handling robots, systems, and methods | Alex Minkovich, Jeffrey C. Hudgens, Brendan Till | 2016-03-29 |