Issued Patents 2016
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513052 | Linear high packing density for LED arrays | Joseph R. Johnson | 2016-12-06 |
| 9498845 | Pulse train annealing method and apparatus | Stephen Moffatt | 2016-11-22 |
| 9462636 | RTP lamp base with removal features | Douglas R. McAllister | 2016-10-04 |
| 9406653 | Integrated solution for solid state light sources in a process chamber | Joseph R. Johnson | 2016-08-02 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2016-07-12 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2016-07-05 |
| 9330955 | Support ring with masked edge | Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa | 2016-05-03 |
| 9318360 | Linear high packing density for LED arrays | Joseph R. Johnson | 2016-04-19 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Blake Koelmel, Errol C. Sanchez | 2016-01-26 |
| 9240341 | Top wafer rotation and support | Oleg V. Serebryanov, Aaron Muir Hunter | 2016-01-19 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |