| 9513052 |
Linear high packing density for LED arrays |
Joseph R. Johnson |
2016-12-06 |
| 9498845 |
Pulse train annealing method and apparatus |
Stephen Moffatt |
2016-11-22 |
| 9462636 |
RTP lamp base with removal features |
Douglas R. McAllister |
2016-10-04 |
| 9406653 |
Integrated solution for solid state light sources in a process chamber |
Joseph R. Johnson |
2016-08-02 |
| 9390950 |
Rapid thermal processing chamber with micro-positioning system |
Khurshed Sorabji, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more |
2016-07-12 |
| 9385004 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more |
2016-07-05 |
| 9330955 |
Support ring with masked edge |
Mehran Behdjat, Norman L. Tam, Aaron Muir Hunter, Koji Nakanishi, Toshiyuki Nakagawa |
2016-05-03 |
| 9318360 |
Linear high packing density for LED arrays |
Joseph R. Johnson |
2016-04-19 |
| 9245786 |
Apparatus and methods for positioning a substrate using capacitive sensors |
Blake Koelmel, Errol C. Sanchez |
2016-01-26 |
| 9240341 |
Top wafer rotation and support |
Oleg V. Serebryanov, Aaron Muir Hunter |
2016-01-19 |
| 9230837 |
Multizone control of lamps in a conical lamphead using pyrometers |
Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more |
2016-01-05 |
