Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449858 | Transparent reflector plate for rapid thermal processing chamber | Aaron Muir Hunter, Alexander Lerner | 2016-09-20 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Alexander Lerner +1 more | 2016-07-12 |
| 9245786 | Apparatus and methods for positioning a substrate using capacitive sensors | Joseph M. Ranish, Errol C. Sanchez | 2016-01-26 |