Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478455 | Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber | Alan Ouye | 2016-10-25 |
| 9473536 | Method, system, and computer program product for facilitating communication in an interoperability network | Michael Dewey | 2016-10-18 |
| 9449858 | Transparent reflector plate for rapid thermal processing chamber | Blake Koelmel, Aaron Muir Hunter | 2016-09-20 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron Muir Hunter, Blake Koelmel +1 more | 2016-07-12 |
| 9337014 | Processing system architecture with single load lock chamber | Vladimir Galburt, Brian P. Brown | 2016-05-10 |