Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478455 | Thermal pyrolytic graphite shadow ring assembly for heat dissipation in plasma chamber | Alexander Lerner | 2016-10-25 |
| 9378930 | Inductively coupled plasma reactor having RF phase control and methods of use thereof | Michael N. Grimbergen, Valentin N. Todorow | 2016-06-28 |
| 9293304 | Plasma thermal shield for heat dissipation in plasma chamber | — | 2016-03-22 |
| 9236284 | Cooled tape frame lift and low contact shadow ring for plasma heat isolation | — | 2016-01-12 |