Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378930 | Inductively coupled plasma reactor having RF phase control and methods of use thereof | Alan Ouye, Valentin N. Todorow | 2016-06-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378930 | Inductively coupled plasma reactor having RF phase control and methods of use thereof | Alan Ouye, Valentin N. Todorow | 2016-06-28 |