Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406540 | Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies | Gary Leray, Samer Banna | 2016-08-02 |
| 9378930 | Inductively coupled plasma reactor having RF phase control and methods of use thereof | Michael N. Grimbergen, Alan Ouye | 2016-06-28 |
| 9362148 | Shielded lid heater assembly | Michael D. Willwerth, David Palagashvili, Stephen Yuen | 2016-06-07 |
| 9318304 | Frequency tuning for dual level radio frequency (RF) pulsing | Gary Leray | 2016-04-19 |