Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443753 | Apparatus for controlling the flow of a gas in a process chamber | Michael D. Willwerth, Jingbao Liu | 2016-09-13 |
| 9362148 | Shielded lid heater assembly | Michael D. Willwerth, Valentin N. Todorow, Stephen Yuen | 2016-06-07 |