Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443753 | Apparatus for controlling the flow of a gas in a process chamber | David Palagashvili, Michael D. Willwerth | 2016-09-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443753 | Apparatus for controlling the flow of a gas in a process chamber | David Palagashvili, Michael D. Willwerth | 2016-09-13 |