Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443753 | Apparatus for controlling the flow of a gas in a process chamber | David Palagashvili, Jingbao Liu | 2016-09-13 |
| 9362148 | Shielded lid heater assembly | David Palagashvili, Valentin N. Todorow, Stephen Yuen | 2016-06-07 |
| 9275887 | Substrate processing with rapid temperature gradient control | Alexander Matyushkin, Dan Katz, John Holland, Theodoros Panagopoulos | 2016-03-01 |