Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275887 | Substrate processing with rapid temperature gradient control | Alexander Matyushkin, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2016-03-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275887 | Substrate processing with rapid temperature gradient control | Alexander Matyushkin, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2016-03-01 |