Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406540 | Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies | Valentin N. Todorow, Samer Banna | 2016-08-02 |
| 9318304 | Frequency tuning for dual level radio frequency (RF) pulsing | Valentin N. Todorow | 2016-04-19 |