Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472378 | Multiple zone coil antenna with plural radial lobes | Vladimir Knyazik, Kyle Tantiwong | 2016-10-18 |
| 9406540 | Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies | Gary Leray, Valentin N. Todorow | 2016-08-02 |
| 9312104 | Coil antenna with plural radial lobes | Vladimir Knyazik, Kyle Tantiwong | 2016-04-12 |
| 9287147 | Substrate support with advanced edge control provisions | Kyle Tantiwong | 2016-03-15 |
| 9257265 | Methods for reducing etch nonuniformity in the presence of a weak magnetic field in an inductively coupled plasma reactor | Alvaro Garcia de Gorordo, Waheb Bishara | 2016-02-09 |