Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9374021 | PWM output voltage measurement apparatus and method | Rangarajan M. Tallam, Doyle F. Busse, Russel J. Kerkman | 2016-06-21 |
| 9337014 | Processing system architecture with single load lock chamber | Vladimir Galburt, Alexander Lerner | 2016-05-10 |