Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337014 | Processing system architecture with single load lock chamber | Alexander Lerner, Brian P. Brown | 2016-05-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337014 | Processing system architecture with single load lock chamber | Alexander Lerner, Brian P. Brown | 2016-05-10 |