Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431278 | Backside rapid thermal processing of patterned wafers | Sundar Ramamurthy, Aaron Muir Hunter | 2016-08-30 |
| 9390950 | Rapid thermal processing chamber with micro-positioning system | Khurshed Sorabji, Joseph M. Ranish, Aaron Muir Hunter, Blake Koelmel, Alexander Lerner +1 more | 2016-07-12 |
| 9245768 | Method of improving substrate uniformity during rapid thermal processing | — | 2016-01-26 |