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Pulse train annealing method and apparatus |
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Crystallization processing for semiconductor applications |
— |
2016-09-27 |
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Process sheet resistance uniformity improvement using multiple melt laser exposures |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Kim Vellore, Samuel C. Howells |
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Magneto-thermal processing apparatus and methods |
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2016-06-28 |
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Methods for crystallizing a substrate using energy pulses and freeze periods |
Bruce E. Adams, Aaron Muir Hunter |
2016-06-21 |
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2016-05-17 |
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Crystallization processing for semiconductor applications |
— |
2016-03-22 |
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Multiple beam combiner for laser processing apparatus |
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2016-03-15 |
