Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9403251 | Minimal contact edge ring for rapid thermal processing | Sairaju Tallavarjula, Kevin Joseph Bautista | 2016-08-02 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2016-07-05 |