Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512520 | Semiconductor substrate processing system | Errol Antonio C. Sanchez, David K. Carlson | 2016-12-06 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2016-01-05 |