Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Shu-Kwan LAU +1 more | 2016-12-27 |
| 9499905 | Methods and apparatus for the deposition of materials on a substrate | Nyi O. Myo | 2016-11-22 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2016-04-26 |
| 9279604 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars +1 more | 2016-03-08 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2016-01-05 |