Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Mehmet Tugrul Samir, Shu-Kwan LAU +1 more | 2016-12-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Mehmet Tugrul Samir, Shu-Kwan LAU +1 more | 2016-12-27 |