Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530638 | Method to grow thin epitaxial films at low temperature | Abhishek Dube, Hua Chung, Jenn-Yue Wang, Yi-Chiau Huang, Schubert S. Chu | 2016-12-27 |
| 9530661 | Method of modifying epitaxial growth shape on source drain area of transistor | Yihwan Kim, Abhishek Dube | 2016-12-27 |
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU +1 more | 2016-12-27 |
| 9460918 | Epitaxy of high tensile silicon alloy for tensile strain applications | Zhiyuan Ye, Saurabh Chopra, Yihwan Kim | 2016-10-04 |