Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli +1 more | 2016-02-23 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Kallol Bera, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. | 2016-02-02 |