Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9336997 | RF multi-feed structure to improve plasma uniformity | — | 2016-05-10 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli, Surajit Kumar +1 more | 2016-02-23 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. | 2016-02-02 |