Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins, Yang Yang +2 more | 2016-09-20 |
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Chinh Dinh, Qingjun Zhou, Srinivas D. Nemani | 2016-06-14 |
| 9330887 | Plasma reactor with tiltable overhead RF inductive source | Kenneth S. Collins, Martin Jeffrey Salinas, Imad Yousif, Ming Xu | 2016-05-03 |
| 9287095 | Semiconductor system assemblies and methods of operation | Kartik Ramaswamy, Srinivas D. Nemani, Bradley J. Howard, Yogananda Sarode Vishwanath | 2016-03-15 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Hamid Tavassoli, Surajit Kumar +1 more | 2016-02-23 |