Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464732 | Apparatus for uniform pumping within a substrate process chamber | Paul B. Reuter, Martin Jeffrey Salinas, Jared Ahmad Lee | 2016-10-11 |
| 9330887 | Plasma reactor with tiltable overhead RF inductive source | Kenneth S. Collins, Andrew Nguyen, Martin Jeffrey Salinas, Ming Xu | 2016-05-03 |