| 9449794 |
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna |
Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Yang Yang +2 more |
2016-09-20 |
| 9443700 |
Electron beam plasma source with segmented suppression electrode for uniform plasma generation |
Leonid Dorf, Shahid Rauf, Nipun Misra, Kartik Ramaswamy, James D. Carducci +1 more |
2016-09-13 |
| 9412563 |
Spatially discrete multi-loop RF-driven plasma source having plural independent zones |
Kartik Ramaswamy, Shahid Rauf, Steven Lane, Yang Yang, Lawrence Wong |
2016-08-09 |
| 9355819 |
Elongated capacitively coupled plasma source for high temperature low pressure environments |
John C. Forster, Joseph Yudovsky, Garry K. Kwong, Tai T. Ngo, Kevin Griffin +1 more |
2016-05-31 |
| 9330887 |
Plasma reactor with tiltable overhead RF inductive source |
Andrew Nguyen, Martin Jeffrey Salinas, Imad Yousif, Ming Xu |
2016-05-03 |
| 9312106 |
Digital phase controller for two-phase operation of a plasma reactor |
Satoru Kobayashi, Kartik Ramaswamy, Shahid Rauf |
2016-04-12 |
| 9269546 |
Plasma reactor with electron beam plasma source having a uniform magnetic field |
Ming-Feng Wu, Ajit Balakrishna, Leonid Dorf, Shahid Rauf, Nipun Misra |
2016-02-23 |
