Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Yang Yang +2 more | 2016-09-20 |
| 9443700 | Electron beam plasma source with segmented suppression electrode for uniform plasma generation | Leonid Dorf, Shahid Rauf, Nipun Misra, Kartik Ramaswamy, James D. Carducci +1 more | 2016-09-13 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kartik Ramaswamy, Shahid Rauf, Steven Lane, Yang Yang, Lawrence Wong | 2016-08-09 |
| 9355819 | Elongated capacitively coupled plasma source for high temperature low pressure environments | John C. Forster, Joseph Yudovsky, Garry K. Kwong, Tai T. Ngo, Kevin Griffin +1 more | 2016-05-31 |
| 9330887 | Plasma reactor with tiltable overhead RF inductive source | Andrew Nguyen, Martin Jeffrey Salinas, Imad Yousif, Ming Xu | 2016-05-03 |
| 9312106 | Digital phase controller for two-phase operation of a plasma reactor | Satoru Kobayashi, Kartik Ramaswamy, Shahid Rauf | 2016-04-12 |
| 9269546 | Plasma reactor with electron beam plasma source having a uniform magnetic field | Ming-Feng Wu, Ajit Balakrishna, Leonid Dorf, Shahid Rauf, Nipun Misra | 2016-02-23 |