Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449796 | Plasma processing system including a symmetrical remote plasma source for minimal ion energy | Ankur Agarwal, Rajinder Dhindsa | 2016-09-20 |
| 9269546 | Plasma reactor with electron beam plasma source having a uniform magnetic field | Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra | 2016-02-23 |