Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520294 | Atomic layer etch process using an electron beam | Rajinder Dhindsa, Shahid Rauf | 2016-12-13 |
| 9449796 | Plasma processing system including a symmetrical remote plasma source for minimal ion energy | Ajit Balakrishna, Rajinder Dhindsa | 2016-09-20 |
| 9362131 | Fast atomic layer etch process using an electron beam | Shahid Rauf, Kartik Ramaswamy | 2016-06-07 |