Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472379 | Method of multiple zone symmetric gas injection for inductively coupled plasma | Steven Lane, Yang Yang, Lawrence Wong | 2016-10-18 |
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins, Yang Yang +2 more | 2016-09-20 |
| 9443700 | Electron beam plasma source with segmented suppression electrode for uniform plasma generation | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, James D. Carducci +1 more | 2016-09-13 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kenneth S. Collins, Shahid Rauf, Steven Lane, Yang Yang, Lawrence Wong | 2016-08-09 |
| 9362131 | Fast atomic layer etch process using an electron beam | Ankur Agarwal, Shahid Rauf | 2016-06-07 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |
| 9312106 | Digital phase controller for two-phase operation of a plasma reactor | Satoru Kobayashi, Shahid Rauf, Kenneth S. Collins | 2016-04-12 |
| 9287095 | Semiconductor system assemblies and methods of operation | Andrew Nguyen, Srinivas D. Nemani, Bradley J. Howard, Yogananda Sarode Vishwanath | 2016-03-15 |