Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Shahid Rauf, Kenneth S. Collins, Yang Yang +2 more | 2016-09-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Shahid Rauf, Kenneth S. Collins, Yang Yang +2 more | 2016-09-20 |